CARTEN’S RG1 SERIES ULTRA-HIGH PURITY REGULATOR
BỘ ĐIỀU CHỈNH ÁP SUẤT RG1 CARTEN
Carten’s RG1 series ultra-high purity regulator is designed for high performance and precise pressure control in point-of-use and medium flow gas systems.
Carten’s RG1 regulator provides control for high purity gas delivery and containment solutions for customers who demand precise pressure control in the semiconductor, photovoltaic, flat panel display, fibre-optics, LED and other high technology industries.
All UHP regulators are assembled and tested in a class 10 cleanroom which support the final cleanliness and purity for Carten’s regulator range of products.
The RG1 series is capable of precise control of gas pressure at or near the process tool for flow rates up to 250 SLPM at 3000 PSIG inlet pressure.
The RG1 series regulator as a metal-to-metal diaphragm seal which provides enhanced leak tight integrity up to 1 x 10-9 atm cc/sec of Helium.
Carten’s standard internal surface finish of 10Ra in contact wetted area enhances the surface quality to support high purity gas delivery to the point-of-use.
Applications for the RG1 series regulator include:
- Gas Cabinets
- Gas Chambers
- Gas Panels
- Gas Sticks
- High Performance Gas and Solvent Systems.
Tài liệu tham khảo: BỘ ĐIỀU CHỈNH ÁP SUẤT RG1 CARTEN